|SAVKOVÁ Jarmila||Západočeská univerzita v Plzni|
|Spoluautoři BLAHOVA Olga|
Films of TiAlSiN were deposited on cold working tool steel, prepared by powder metallurgy, substrates by a commercial cathodic arc-plasma deposition system. Presence of TiN and AlN crystal phase was found on films, but no XRD peaks related to Al and Si were found. Hardness, morphology and adhesion of films changed with different deposition parameters. Hardness and modulus of prepared coatings were measured by nanoindentation with Nanoindenter XP Maximum hardness (39.44GPa) of films was found on sample with ratio Al:Ti:Si 1:1:0.1.